| Code |
Course Name |
Language |
Type |
| MAK 378E |
Introduction to Nanotechnology and Nanosystems |
English |
Elective |
| Local Credits |
ECTS |
Theoretical |
Tutorial |
Laboratory |
| 2.5 |
5 |
2 |
1 |
0 |
| Course Prerequisites and Class Restriction |
| Prerequisites |
(MAL 201 MIN DD
or MAL 201E MIN DD
or MAK 213 MIN DD
or MAK 213E MIN DD)
and (MAK 313 MIN DD
or MAK 313E MIN DD
or MAK 311 MIN DD
or MAK 311E MIN DD
or MAK 216 MIN DD
or MAK 216E MIN DD
or MAK 218 MIN DD
or MAK 218E MIN DD
or IML 305 MIN DD
or IML 305E MIN DD)
|
| Class Restriction |
None |
| Course Description |
| The definition of nanoscience and nanotechnology, basics of nano-fabrication, nano-materials and their properties, vacuum science
and technology, principles of pattern formation in nano-scale, types and technology of lithography, fabrication techniques of thin
films, wet and dry etching of materials, advanced lithography techniques, nano-particle synthesis and self-assembly, characterization
tools. |
|
